Microstructure and tribological properties of TiSiCN composite coatings with different carbon contents deposited by plasma‐enhanced magnetron sputtering

TiSiCN composite coatings with different C contents were prepared on Cr buffer layer by plasma‐enhanced magnetron sputtering. The structure, composition, surface, and cross‐sectional morphology of the characterized X‐ray photoelectron spectroscopy, diffraction, Raman scanning electron microscope, atomic force microscope. hardness, elastic modulus, tribological performance evaluated nanoindentation reciprocating friction tests. results showed that are amorphous structure composed TiCN compound microcrystalline graphite, phases. increase content changed distribution ceramics nanocrystal, Si 3 N 4 carbon (sp ‐ sp 2 ‐hybridized C), thus affecting hardness behavior coatings. was related to phase ‐C in coating 68.2% had lower coefficient lowest wear rate.